Some observations on the operation of a sputter ion pumped system

✍ Scribed by P Vijendran; Sunder Dass

• Publisher: Elsevier Science
• Year: 1976
• Tongue: English
• Weight: 95 KB
• Volume: 26
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/s0042-207x(76)80229-1

✦ Synopsis

We have been using a standard sorption-sputter ion pumped 'clean' system for annealing of metal wires. These metal wires (eg W, MO, Ta, Ir etc.) are used as specimen tips in field emission and ion microscopy (FEM/FIM).

The system schematic is shown in Figure I.