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Some observations on the operation of a sputter ion pumped system

โœ Scribed by P Vijendran; Sunder Dass


Publisher
Elsevier Science
Year
1976
Tongue
English
Weight
95 KB
Volume
26
Category
Article
ISSN
0042-207X

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โœฆ Synopsis


We have been using a standard sorption-sputter ion pumped 'clean' system for annealing of metal wires. These metal wires (eg W, MO, Ta, Ir etc.) are used as specimen tips in field emission and ion microscopy (FEM/FIM).

The system schematic is shown in Figure I.


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