✦ LIBER ✦
Some investigations into plasmaless dry etching of silicon and its oxide with molecular fluorine
✍ Scribed by A. Guber; U. Köhler
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 38 KB
- Volume
- 54
- Category
- Article
- ISSN
- 0022-1139
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