Some fundamental aspects of glow discharges in plasma-assisted processes
β Scribed by K.S. Fancey; A. Matthews
- Book ID
- 107929976
- Publisher
- Elsevier Science
- Year
- 1987
- Tongue
- English
- Weight
- 835 KB
- Volume
- 33
- Category
- Article
- ISSN
- 0257-8972
No coin nor oath required. For personal study only.
π SIMILAR VOLUMES
The influence of basic elementary processes in a simplified model of an Arplasma on the electron distribution function has been studied by computer experiment. The main aim of simulation was to build the qualitative model of plasma based on a reduced set of scattering processes. Its ability to maint
The formation of ions following the termination of power in a pulsed glow discharge ion source is investigated. The populations of ionized species containing sputtered atoms M(+), M 2 (1) :, and MAr(+) are observed to maximize after the termination of discharge power. Collisions involving sputtered