Some features of RF excited fully ionized low pressure argon plasma

✍ Scribed by R. Boswell; R. Porteous; A. Prytz; A. Bouchoule; P. Ranson

• Book ID: 107986341
• Publisher: Elsevier Science
• Year: 1982
• Tongue: English
• Weight: 300 KB
• Volume: 91
• Category: Article
• ISSN: 0375-9601
• DOI: 10.1016/0375-9601(82)90823-4