Some characteristics of the crystalline-amorphous threshold point of 31P+ ion-implanted silicon substrates

✍ Scribed by Aharoni, H.; Swart, P.L.; Lacquet, B.M.

• Book ID: 114554940
• Publisher: IEEE
• Year: 1991
• Tongue: English
• Weight: 256 KB
• Volume: 38
• Category: Article
• ISSN: 0018-9499
• DOI: 10.1109/23.83861