Some applications of triode sputtering to integrated circuits: J H Hall, Vacuum, 17 (5), May 1967, 261–264

• Publisher: Elsevier Science
• Year: 1967
• Tongue: English
• Weight: 174 KB
• Volume: 17
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(67)90764-6