Studies of solution processed metal oxid
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K. Shanmugasundaram; M. Brubaker; K. Chang; P. Mumbauer; P. Roman; J. Ruzyllo
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Article
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2007
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Elsevier Science
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English
β 990 KB
With the growing diversification of semiconductor device applications there is a growing need for broader inclusion of metal oxides into mainstream semiconductor technology. The common feature for this class of materials is that their dielectric constant is higher than that of SiO 2 . Moreover, some