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Solidly mounted ZnO shear mode film bulk acoustic resonators for sensing applications in liquids

✍ Scribed by Link, M.; Schreiter, M.; Weber, J.; Primig, R.; Pitzer, D.; Gabl, R.

Book ID: 121382401
Publisher: IEEE
Year: 2006
Tongue: English
Weight: 758 KB
Volume: 53
Category: Article
ISSN: 0885-3010
DOI: 10.1109/TUFFC.2006.1593389

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