✦ LIBER ✦
Solid planar diffusion sources based on phosphorus nitride prepared by a one-stage process in a pulse discharge
✍ Scribed by M. Raicis; L. Raicis
- Book ID
- 103632060
- Publisher
- Elsevier Science
- Year
- 1996
- Tongue
- English
- Weight
- 366 KB
- Volume
- 78
- Category
- Article
- ISSN
- 0257-8972
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