✦ LIBER ✦
Solid phase epitaxy of ultra-shallow Sn implanted Si observed using high-resolution Rutherford backscattering spectrometry
✍ Scribed by Chan, T. K.; Fang, F.; Markwitz, A.; Osipowicz, T.
- Book ID
- 121335753
- Publisher
- American Institute of Physics
- Year
- 2012
- Tongue
- English
- Weight
- 1013 KB
- Volume
- 101
- Category
- Article
- ISSN
- 0003-6951
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