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Solid-phase epitaxy of NiSi2 layer on Si(111) substrate from Si/Ni multi-layer structure prepared by molecular beam deposition

✍ Scribed by Akitoshi Ishizaka; Yasuhiro Shiraki


Publisher
Elsevier Science
Year
1986
Weight
17 KB
Volume
174
Category
Article
ISSN
0167-2584

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