Solid-phase crystallization of high-quality Si films on SiO2 by local Ge-insertion

✍ Scribed by I. Tsunoda; K. Nagatomo; A. Kenjo; T. Sadoh; M. Miyao

• Book ID: 113936519
• Publisher: Elsevier Science
• Year: 2004
• Tongue: English
• Weight: 305 KB
• Volume: 451-452
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/j.tsf.2003.11.011