Sol-gel channel waveguide on silicon: fast direct imprinting and low cost fabrication

✍ Scribed by P. Coudray; P. Etienne; Y. Moreau; J. Porque; S.I. Najafi

• Book ID: 108362887
• Publisher: Elsevier Science
• Year: 1997
• Tongue: English
• Weight: 370 KB
• Volume: 143
• Category: Article
• ISSN: 0030-4018
• DOI: 10.1016/s0030-4018(97)00445-8