Soft magnetic FeCoTaN film cores for new high-frequency CMOS compatible micro-inductors

✍ Scribed by K. Seemann; H. Leiste; C. Ziebert

• Book ID: 113724821
• Publisher: Elsevier Science
• Year: 2007
• Tongue: English
• Weight: 630 KB
• Volume: 316
• Category: Article
• ISSN: 0304-8853
• DOI: 10.1016/j.jmmm.2007.03.126