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Soft Imprinting: Creating Highly Ordered Porous Anodic Alumina Templates on Substrates for Nanofabrication

✍ Scribed by A. S. Maria Chong; L. K. Tan; J. Deng; H. Gao


Publisher
John Wiley and Sons
Year
2007
Tongue
English
Weight
754 KB
Volume
17
Category
Article
ISSN
1616-301X

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Formation of porous anodic alumina templ
✍ Gianneta, V. ;Huffman, M. ;Nassiopoulou, A. G. 📂 Article 📅 2009 🏛 John Wiley and Sons 🌐 English ⚖ 483 KB

## Abstract The local formation of porous anodic alumina (PAA) thin films on confined areas measuring few μm^2^ through an SiO~2~ masking layer on the silicon substrate has been developed. The locally grown porous anodic alumina thin films showed highly symmetric vertical cylindrical pores with a p