✦ LIBER ✦
Sodium diffusion in plasma-deposited amorphous oxygen-doped silicon nitride (a-SiON: H films): J W Osenbach and S S Voris, J appl Phys, 63 1988, 4494–4500
- Publisher
- Elsevier Science
- Year
- 1989
- Tongue
- English
- Weight
- 152 KB
- Volume
- 39
- Category
- Article
- ISSN
- 0042-207X
No coin nor oath required. For personal study only.