Small area X-ray photoelectron spectroscopy (SAXPS) analysis of microscopic contamination in semiconductor materials and processes

✍ Scribed by MR Marks; L Kintrup; K Bittigau

• Publisher: Elsevier Science
• Year: 1995
• Tongue: English
• Weight: 510 KB
• Volume: 46
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(94)00060-3