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Small angle X-ray scattering measurements of porous low-k films using synchrotron radiation

✍ Scribed by Takashi Suzuki; Kazuhiko Omote; Yoshiyasu Ito; Ichiro Hirosawa; Yoshihiro Nakata; Iwao Sugiura; Noriyoshi Shimizu; Tomoji Nakamura

No coin nor oath required. For personal study only.

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