✦ LIBER ✦
Slow positron beam study of nitrogen implanted CZ-Si subjected to rapid thermal processing
✍ Scribed by X.P. Hao; R.S. Yu; B.Y. Wang; H.L. Chen; D.N. Wang; C.X. Ma; L. Wei
- Publisher
- Elsevier Science
- Year
- 2007
- Tongue
- English
- Weight
- 382 KB
- Volume
- 253
- Category
- Article
- ISSN
- 0169-4332
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