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Slot antenna 2.45 GHz microwave plasma source

✍ Scribed by Werner, F; Korzec, D; Engemann, J

Book ID: 121253580
Publisher: Institute of Physics
Year: 1994
Tongue: English
Weight: 599 KB
Volume: 3
Category: Article
ISSN: 0963-0252
DOI: 10.1088/0963-0252/3/4/004

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