Size metrology of a pure phase object based on the laser probe beam reshaping

✍ Scribed by Fromager, Michael; Brunel, Marc; Aït-Ameur, Kamel

• Book ID: 121680463
• Publisher: Elsevier Science
• Year: 2014
• Tongue: English
• Weight: 491 KB
• Volume: 54
• Category: Article
• ISSN: 0143-8166
• DOI: 10.1016/j.optlaseng.2013.10.008