✦ LIBER ✦
SiO2 layer implanted with N2+ ions as a negative inorganic resist for ion beam lithography
✍ Scribed by Zbigniew Znamirowski; Janusz Martan
- Book ID
- 113277205
- Publisher
- Elsevier Science
- Year
- 1985
- Tongue
- English
- Weight
- 357 KB
- Volume
- 7-8
- Category
- Article
- ISSN
- 0168-583X
No coin nor oath required. For personal study only.