The authors present the design, realization and characterization of photonics integrated made up of organosilicon (SiO x C y H z ) materials called hexamethyldisiloxane plasma polymers (pp-HMDSO), elaborated by plasma enhanced chemical vapour deposition (PECVD). Such a versatile technique offers the
✦ LIBER ✦
Single-mode TE00–TM00 optical waveguides on SU-8 polymer
✍ Scribed by B Bêche; N Pelletier; E Gaviot; J Zyss
- Book ID
- 104072622
- Publisher
- Elsevier Science
- Year
- 2004
- Tongue
- English
- Weight
- 172 KB
- Volume
- 230
- Category
- Article
- ISSN
- 0030-4018
No coin nor oath required. For personal study only.
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