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Single MEMS device

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📜 SIMILAR VOLUMES

Single wafer encapsulation of mems devic

✍ Candler, R.N.; Woo-Tae Park, ; Huimou Li, ; Yama, G.; Partridge, A.; Lutz, M.; K 📂 Article 📅 2003 🏛 IEEE 🌐 English ⚖ 711 KB

Single mask fabrication process for mova

✍ Alamin Dow, Ali B.; Gougam, Adel; Kherani, Nazir P.; Rangelow, I. W. 📂 Article 📅 2014 🏛 Springer-Verlag 🌐 English ⚖ 447 KB

Reliability and failure in single crysta

✍ Neels, A.; Dommann, A.; Schifferle, A.; Papes, O.; Mazza, E. 📂 Article 📅 2008 🏛 Elsevier Science 🌐 English ⚖ 571 KB

Improving MEMS devices

📂 Article 📅 2001 🏛 Elsevier Science 🌐 English ⚖ 154 KB

Manufacture of MEMS devices

📂 Article 📅 2001 🏛 Elsevier Science 🌐 English ⚖ 161 KB

Nonlocal problems in MEMS device control

✍ J.A. Pelesko; A.A. Triolo 📂 Article 📅 2001 🏛 Springer 🌐 English ⚖ 168 KB