Single-layer resist for deep, micro- and nanometer structure transfer

✍ Scribed by P. Hudek; Z. Borkowicz; I. Kostic; I.W. Rangelow; R. Kassing

• Book ID: 103598957
• Publisher: Elsevier Science
• Year: 1993
• Tongue: English
• Weight: 743 KB
• Volume: 21
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/0167-9317(93)90074-f