Single-junction a-Si solar cells with over 13% efficiency

✍ Scribed by Y. Ashida

• Publisher: Elsevier Science
• Year: 1994
• Tongue: English
• Weight: 527 KB
• Volume: 34
• Category: Article
• ISSN: 0927-0248
• DOI: 10.1016/0927-0248(94)90053-1

✦ Synopsis

Single junction hydrogenated amorphous silicon solar cells having a high conversion efficiency of 13.2% were developed by combining three approaches. First, a new type of p-layer, such as (a-Si/a-C) n multilayers, was investigated. The high open-circuit voltage was obtained without lowering the short-circuit current and the fill factor. Second, alternately repeating deposition and hydrogen plasma treatment method was applied to the fabrication of an a-SiC or wide gap a-Si:H films for p/i interface layer. High photoconductive and wide bandgap materials were obtained applicable to the p/i buffer layers. Third, the relationships between defect density of films or fill factors of solar cells and hydrogen radical in plasma were investigated. It was suggested that the H*/SiH* ratio was an effective parameter to improve the defect and fill factor, and the excess hydrogen radical deteriorated quality of films and cells.