Proton beam writing of microstructures a
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F. Menzel; D. Spemann; S. Petriconi; J. Lenzner; T. Butz
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Article
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2006
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Elsevier Science
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English
⚖ 342 KB
Proton beam writing (PBW) is a direct writing technique which allows the creation of three-dimensional structures with a high aspect ratio in the micrometer and nanometer range in photoresist materials without the use of templates. At the high-energy ion nanoprobe LIPSION of the University of Leipzi