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Single ion bombardment of living cells at LIPSION

✍ Scribed by T. Reinert; A. Fiedler; J. Škopek; J. Tanner; J. Vogt; T. Butz


Book ID
113822860
Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
368 KB
Volume
219-220
Category
Article
ISSN
0168-583X

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Proton beam writing (PBW) is a direct writing technique which allows the creation of three-dimensional structures with a high aspect ratio in the micrometer and nanometer range in photoresist materials without the use of templates. At the high-energy ion nanoprobe LIPSION of the University of Leipzi