Single etch grating couplers for mass fabrication with DUV lithography

✍ Scribed by Halir, R.; Zavargo-Peche, L.; Xu, D.-X.; Cheben, P.; Ma, R.; Schmid, J. H.; Janz, S.; Densmore, A.; Ortega-Moñux, A.; Molina-Fernández, Í.; Fournier, M.; Fédeli, J.-M.

• Book ID: 118807694
• Publisher: Springer
• Year: 2012
• Tongue: English
• Weight: 288 KB
• Volume: 44
• Category: Article
• ISSN: 0306-8919
• DOI: 10.1007/s11082-012-9563-2