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Single-crystal Ti[sub 2]AlN thin films

✍ Scribed by Joelsson, T.; HoÌrling, A.; Birch, J.; Hultman, L.

Book ID: 120065983
Publisher: American Institute of Physics
Year: 2005
Tongue: English
Weight: 485 KB
Volume: 86
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.1882752

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