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Single-crystal thin-film growth of LiNbO3 for electrooptic modulator by rf sputtering method and its properties

✍ Scribed by Toshiharu Kamiya; Yasumitsu Miyazaki; Yasuo Akao


Book ID
112080875
Publisher
John Wiley and Sons
Year
1979
Tongue
English
Weight
959 KB
Volume
99
Category
Article
ISSN
0424-7760

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YBa,Cu,O,\_x superconducting thin films with a-axis perpendicular to the substrate were grown on both LaSrGaO, (100) and SrTiO, (100) single crystals by off-axis rf sputtering and their properties were compared. The film grown at 740 "C on a self-template layer grown in situ at 650 "C on LaSrGaO, (1