✦ LIBER ✦
Single crystal silicon nanomechanisms for scanned-probe device arrays: MacDonald, N. C. IEEE Solid-State Sensor and Actuator Workshop; 1992 Jun 22; Hilton Head Island, SC. New York, NY: IEEE; 1992
- Book ID
- 103530845
- Publisher
- Elsevier Science
- Year
- 1993
- Tongue
- English
- Weight
- 267 KB
- Volume
- 15
- Category
- Article
- ISSN
- 0141-6359
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