✦ LIBER ✦
Simultaneous RHEED-AES-QMS study on epitaxial Si film growth on Si(111) and sapphire (1102) surfaces by partially ionized vapor deposition
- Publisher
- Elsevier Science
- Year
- 1980
- Tongue
- English
- Weight
- 164 KB
- Volume
- 30
- Category
- Article
- ISSN
- 0042-207X
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