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Simultaneous diffusion of Si and N in silicon nitride

✍ Scribed by Schmidt, H.; Geckle, U.; Bruns, M.

Book ID: 119948236
Publisher: The American Physical Society
Year: 2006
Tongue: English
Weight: 124 KB
Volume: 74
Category: Article
ISSN: 1098-0121
DOI: 10.1103/PhysRevB.74.045203

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