Simultaneous aluminum—Silicon metallization by ion-probe-controlled electron beam evaporation

✍ Scribed by F. Hegner; A. Feuerstein

• Book ID: 103424116
• Publisher: Elsevier Science
• Year: 1978
• Tongue: English
• Weight: 932 KB
• Volume: 53
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(78)90027-5