✦ LIBER ✦
Simulations of the gas flux distribution for different gas showers and filament geometries on the large-area deposition of amorphous silicon by hot-wire CVD
✍ Scribed by A. Pflűger; B. Schröder
- Book ID
- 117145637
- Publisher
- Elsevier Science
- Year
- 2002
- Tongue
- English
- Weight
- 259 KB
- Volume
- 299-302
- Category
- Article
- ISSN
- 0022-3093
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