Simulation study on regeneration of depth profiles from angle-resolved XPS data

✍ Scribed by Ro, Chul-Un

• Publisher: John Wiley and Sons
• Year: 1997
• Tongue: English
• Weight: 308 KB
• Volume: 25
• Category: Article
• ISSN: 0142-2421
• DOI: 10.1002/(sici)1096-9918(199710)25:11<869::aid-sia310>3.0.co;2-d

✦ Synopsis

This simulation study investigates the inÑuences of sampling schemes, errors in the data and depth proÐling functions on the extraction of the depth proÐles from angle-resolved XPS data. An equiangular sampling scheme is more susceptible to the ill-posedness in the inverse operation of the Laplace transform than equidistance or gravimetric samplings. The inÑuence of errors in the data can be considerable, depending on the types of depth proÐles. Smooth depth proÐling functions are well recovered, even for data with 10% errors. For discontinuous depth proÐles, regenerated depth proÐles do not represent the sharp change of original depth proÐles at the interface.