Simulation of x-ray spectra generated by electron impact on solids

✍ Scribed by E. Acosta; X. Llovet; E. Coleoni; F. Salvat; J. A. Riveros

• Publisher: John Wiley and Sons
• Year: 1999
• Tongue: English
• Weight: 130 KB
• Volume: 28
• Category: Article
• ISSN: 0049-8246
• DOI: 10.1002/(sici)1097-4539(199903/04)28:2<121::aid-xrs305>3.0.co;2-a

✦ Synopsis

A simulation algorithm that generates x-ray emission spectra of samples irradiated with kilovolt electron beams was developed. The algorithm is based on a Monte Carlo package which performs simulations of both electron and photon transport for arbitrary materials and geometries. The code uses semi-empirical ionization cross-sections obtained from an optical data model and a simple model to describe the angular distribution of bremsstrahlung photons. The simulation efficiency is optimized by the use of a variance reduction technique. The reliability of the simulation code was analyzed by comparing the results with electron probe measurements for di †erent specimens and measurement conditions, including thin Ðlms and oblique incidence. In general, there was good agreement between the simulation results and experiences.