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Simulation of time depending particle transport during dry etch process

✍ Scribed by K. Börnig; J. Pelka

Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 302 KB
Volume: 21
Category: Article
ISSN: 0167-9317
DOI: 10.1016/0167-9317(93)90083-h

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