✦ LIBER ✦
Simulation of the sputtered atom transport during a pulse deposition process in single- and dual-magnetron systems
✍ Scribed by Kuzmichev, A.; Goncharuk, I.
- Book ID
- 124095469
- Publisher
- IEEE
- Year
- 2003
- Tongue
- English
- Weight
- 407 KB
- Volume
- 31
- Category
- Article
- ISSN
- 0093-3813
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