𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Simulation of the dielectric constant of aerogels and estimation of their water content

✍ Scribed by X. Xiao; R. Streiter; H. Wolf; G. Ruan; C. Murray; T. Gessner

Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
83 KB
Volume
55
Category
Article
ISSN
0167-9317

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✦ Synopsis

Nanoporous silica aerogels are promising candidates for ultra-low-k dielectrics used in the metallization system of the 0.13 mm IC generation and beyond. In this paper the relation between dielectric constant and microstructure is investigated. Application of an electrostatic field solver to several geometric models of microstructure shows that the effective dielectric constant is mainly determined by porosity, whereas the influence of geometric parameters such as pore shape, pore size, and pore-size distribution is comparably weak. Evaluation of experimental data shows some measured values of Β΄above the results of the simulation. The difference is due to contamination of the internal surface area with hydroxyl radicals and water molecules depending on the manner of post-treatment of aerogel thin films. The effective concentration of water is estimated by comparison of experimental data and simulation results.

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