Simulation of species transport during growth of compound semiconductors over patterned substrates

✍ Scribed by Yu.N. Makarov; M.S. Ramm; E.A. Subashieva; A.I. Zhmakin

• Publisher: Elsevier Science
• Year: 1994
• Tongue: English
• Weight: 604 KB
• Volume: 145
• Category: Article
• ISSN: 0022-0248
• DOI: 10.1016/0022-0248(94)91062-6