✦ LIBER ✦

Simulation of RF plasma flowing at low pressure

✍ Scribed by Zheltukhin, V. S.; Shemakhin, A. Yu.

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

An efficient Monte Carlo simulator for l

✍ Ardehali, M.; Matsumoto, H. 📂 Article 📅 1997 🏛 IEEE 🌐 English ⚖ 158 KB

RF plasma polymerization of ethane in a

✍ P. Canepa; G. Castello; S. Munari; M. Nicchia 📂 Article 📅 1982 🏛 Elsevier Science ⚖ 410 KB

Numerical modeling of low-pressure RF pl

✍ Vendor, D.; Boswell, R.W. 📂 Article 📅 1990 🏛 IEEE 🌐 English ⚖ 786 KB

Modeling and diagnostic of an SF6 RF pla

✍ Riccardi, C.; Barni, R.; de Colle, F.; Fontanesi, M. 📂 Article 📅 2000 🏛 IEEE 🌐 English ⚖ 250 KB

Characteristics of RF Cold Plasma at Atm

✍ Liang, Qiu; Yuedong, Meng; Xingsheng, Shu 📂 Article 📅 2007 🏛 IOP Publishing 🌐 English ⚖ 259 KB

Scaling characteristics of plasma parame

✍ Chung, T.H.; Seo, D.C.; Kim, G.H.; Kim, J.S. 📂 Article 📅 2001 🏛 IEEE 🌐 English ⚖ 98 KB