Simulation of redistribution of donor impurity in silicon during rapid thermal annealing with regard for percolation effect

✍ Scribed by Burenkov, A. F.; Komarov, F. F.; Fedotov, S. A.

• Book ID: 126735608
• Publisher: Taylor and Francis Group
• Year: 1990
• Tongue: English
• Weight: 277 KB
• Volume: 115
• Category: Article
• ISSN: 1042-0150
• DOI: 10.1080/10420159008220552