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Simulation of redeposition of carbon/hydrocarbon on a material surface with castellated structures

✍ Scribed by K. Inai; K. Ohya; Y. Tomita; A. Kirschner; A. Litnovsky; T. Tanabe


Book ID
108186934
Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
401 KB
Volume
390-391
Category
Article
ISSN
0022-3115

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