✦ LIBER ✦
Simulation of reactive sputtering from a concentric dual-source magnetron in roll-to-roll coating processes
✍ Scribed by CD Tsiogas; JN Avaritsiotis
- Publisher
- Elsevier Science
- Year
- 1994
- Tongue
- English
- Weight
- 1010 KB
- Volume
- 45
- Category
- Article
- ISSN
- 0042-207X
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