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Simulation of fractal cluster growth on a substrate under ion bombardment

✍ Scribed by Kh. B. Ashurov; S. E. Maksimov; B. L. Oksengendler; O. E. Sidorenko; M. B. Guseva


Book ID
110203424
Publisher
Pleiades Publishing
Year
2011
Tongue
English
Weight
232 KB
Volume
5
Category
Article
ISSN
1027-4510

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A molecular dynamics simulation of clust
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Cluster ion implantation is a useful technique for manufacturing ultra-shallow-junction. In order to investigate the depth and lateral distribution as well as cluster dissociation, we performed a molecular dynamics simulation that injects 200-500 eV/atom boron cluster into single crystal silicon. Th