Simulation of coherent multiple imaging by means of pupil-plane filtering in optical microlithography

✍ Scribed by Erdélyi, M.; Bor, Zs.; Wilson, W. L.; Smayling, M. C.; Tittel, F. K.

• Book ID: 115388704
• Publisher: Optical Society of America
• Year: 1999
• Tongue: English
• Weight: 282 KB
• Volume: 16
• Category: Article
• ISSN: 1084-7529
• DOI: 10.1364/JOSAA.16.001909