✦ LIBER ✦
Simulation experiment on chemical sputtering of carbides for the ECR and glow discharge cleaning
✍ Scribed by Y. Sakamoto; H. Oyama; S. Kakinuma
- Publisher
- Elsevier Science
- Year
- 1984
- Tongue
- English
- Weight
- 572 KB
- Volume
- 128-129
- Category
- Article
- ISSN
- 0022-3115
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