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Simulation and analysis for microstructure profile of optical lithography based on SU-8 thick resist

✍ Scribed by Xionggui Tang; Xiaoyu Yang; Fuhua Gao; Yongkang Guo

Book ID: 108207734
Publisher: Elsevier Science
Year: 2007
Tongue: English
Weight: 549 KB
Volume: 84
Category: Article
ISSN: 0167-9317
DOI: 10.1016/j.mee.2007.01.147

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