SIMS study of annealing effect on element distribution in free-standing Al/Si and Zr/ZrSi2multilayer films

✍ Scribed by M. N. Drozdov; Yu. N. Drozdov; E. B. Kluenkov; V. I. Luchin; A. Ya. Lopatin; N. N. Salashchenko; N. N. Tsybin; L. A. Shmaenok

• Book ID: 110203240
• Publisher: Pleiades Publishing
• Year: 2010
• Tongue: English
• Weight: 772 KB
• Volume: 4
• Category: Article
• ISSN: 1027-4510
• DOI: 10.1134/s1027451010030092